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摘要:
In this paper,we propose an in-process measurement method of the diameter of micro-optical fiber such as a tapered optical fiber.The proposed technique is based on analyzing optically scattered light generated by standing wave illumination.The proposed method is significant in that it requires an only limited measurement range and does not require a high dynamic range sensor.These properties are suitable for in-process measurement.This experiment verified that the proposed method could measure a fiber diameter as stable as±0.01μm under an air turbulence environment.As a result of comparing the measured diameter distribution with those by scanning electron microscopy,it was confirmed that the proposed method has a measurement accuracy better than several hundred nanometers.
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篇名 In-Process Diameter Measurement Technique for Micro-Optical Fiber with Standing Wave Illumination
来源期刊 纳米制造与计量(英文) 学科 工学
关键词 Micro-fiber In-process measurement Mi scattering theory Standing wave DIAMETER
年,卷(期) 2021,(1) 所属期刊栏目
研究方向 页码范围 28-36
页数 9页 分类号 TN2
字数 语种
DOI
五维指标
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节点文献
Micro-fiber
In-process
measurement
Mi
scattering
theory
Standing
wave
DIAMETER
研究起点
研究来源
研究分支
研究去脉
引文网络交叉学科
相关学者/机构
期刊影响力
纳米制造与计量(英文)
季刊
2520-811X
12-1463/TB
出版文献量(篇)
30
总下载数(次)
0
总被引数(次)
0
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